| Abstract | PhD thesis of Diana Grishina |
|---|---|
| Authors | D. A. Grishina |
| Year of publication | 2017 |
| Date published | 07/2017 |
| Journal | Thesis advisor: W. L. Vos |
| School | University of Twente |
| DOI number | 10.3990/1.9789036543743 |
| Keywords | DRIE, etch mask, etching, fabrication, FIB, lithography, nanofabrication, nanotechnology, optics, patterning, phase retrieval, photonic crystals, photonics, reflectivity, RIE, Si, UV lithography, X-ray tomography |