Abstract

PhD thesis of Diana Grishina

Authors

D. A. Grishina

Year of publication

2017

Date published

07/2017

Journal

Thesis advisor: W. L. Vos

School

University of Twente

DOI number

10.3990/1.9789036543743

Keywords

DRIE, etch mask, etching, fabrication, FIB, lithography, nanofabrication, nanotechnology, optics, patterning, phase retrieval, photonic crystals, photonics, reflectivity, RIE, Si, UV lithography, X-ray tomography