etch mask Archives - Complex Photonic Systems

Submitted	Downloads
Copied! Deep-UV Lithographic realization of aperture arrays as etch masks for 3D Nanostructures in Silicon D. A. Grishina, E. Yüce, C. A. M. Harteveld, and W. L. Vos	Bibtex
2015	Downloads
Copied! Method to make a single-step etch mask for 3D monolithic nanostructures D. A. Grishina, C. A. M. Harteveld, L. A. Woldering, and W. L. Vos Nanotechnology 26, 505302: 1-10 (2015)	Bibtex pdf