nanotechnology

X-Ray Imaging of Functional Three-Dimensional Nanostructures on Massive Substrates
D. A. Grishina, C. A. M. Harteveld, A. Pacureanu, D. Devashish, A. Lagendijk, P. Cloetens, and W. L. Vos
ACS Nano 13, 13932-13939 (2019)

Method to make a single-step etch mask for 3D monolithic nanostructures
D. A. Grishina, C. A. M. Harteveld, L. A. Woldering, and W. L. Vos
Nanotechnology 26, 505302: 1-10 (2015)

A method to pattern masks in two inclined planes for three-dimensional nano- and microfabrication
W. R. Tjerkstra, L. A. Woldering, J. M. Van den Broek, F. Roozeboom, I. D. Setija, and W. L. Vos
J. Vac. Sci. Technol. B 29, 061604: 1-8 (2011)