three-dimensional nanostructures

Targeted positioning of quantum dots inside 3D silicon photonic crystals revealed by synchrotron X-ray fluorescence tomography
A. S. Schulz, C. A. M. Harteveld, G. J. Vancso, J. Huskens, P. Cloetens, and W. L. Vos
ACS Nano 16, 3674−3683 (2022)

Fabrication of three-dimensional nanostructures by focused ion beam milling
R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, and W. L. Vos
J. Vac. Sci. Technol. B. 26, 973-977 (2008)