CMOS-compatible

X-Ray Imaging of Functional Three-Dimensional Nanostructures on Massive Substrates
D. A. Grishina, C. A. M. Harteveld, A. Pacureanu, D. Devashish, A. Lagendijk, P. Cloetens, and W. L. Vos
ACS Nano 13, 13932-13939 (2019)

Signature of a three-dimensional photonic band gap observed on silicon inverse woodpile photonic crystals
S. R. Huisman, R. V. Nair, L. A. Woldering, M. D. Leistikow, A. P. Mosk, and W. L. Vos
Phys. Rev. B 83, 205313: 1-7 (2011)